空間光調(diào)制器SLM的特點(diǎn)：此款空間光調(diào)制器SLM（Spatial light modulator）可應(yīng)用于任何需要對光束進(jìn)行連續(xù)調(diào)制的場合。其應(yīng)用之一是用于優(yōu)異光刻掩膜板。
Data of one-megapixel SLM （1M像素空間光調(diào)制器SLM指標(biāo)如下）：
Parameter Value Remark
Matrix size 2048 × 512 mirrors
Pixel size 16 × 16 μm²
Frame rate 2 kHz
Mirror edge deflection 0 - 180 nm up to 350 nm possible
Wavelength 248 nm up to ca. 1500 nm possible
Average beam power 40 mW elevated power possible; wavelength dependent
Data voltage 0 - 25.5 V analogue
Data inputs 256
此款空間光調(diào)制器SLM采用微光機(jī)電系統(tǒng)構(gòu)成，詳細(xì)的說明請參考如下：
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective
aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications
are available or under development.
