Gas Mass Flow Controllers for low flow rates

Bronkhorst® model FG-201CV High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.