規格 | 測量面對基面垂直度 | 測量面平面度或垂直度 | 基面平面度或直線度 | |||
精度等級(微米) | ||||||
00 | 0 | 00 | 0 | 00 | 0 | |
SC100×63 | 2 | 4 | 1 | 1 | 1 | 1 |
SC160×100 | 2 | 4 | 1 | 2 | 1 | 1 |
SC250×160 | 2.5 | 5 | 1 | 2 | 1 | 2 |
SC400×250 | 3.5 | 7 | 1 | 2.5 | 1 | 2 |
SC630×400 | 4.5 | 9 | 1.5 | 3 | 1 | 2.5 |
SC1000×630 | 6 | 12 | 2.5 | 5 | 1.5 | 3 |