超高精度真空壓力PID控制裝置
Ultra High Precision Vacuum Pressure PID Controller
上海依陽公司推出的超高精度真空壓力PID控制裝置是一種采用電氣比例閥，但通過外置超高精度傳感器和PID控制器，實現真空壓力超高精度控制的裝置，由此可實現真空、微正壓、高壓和超高壓范圍內的精密控制，可實現優于±0.1%的真空壓力超高精度控制，國內工業應用領域內超高精度真空壓力控制的空白，并可替代國外相關產品。
一、微正壓超高精度PID控制裝置
Micro Positive Pressure Ultra High Precision PID Control Device
微正壓控制裝置主要包括微正壓電氣比例閥和相應量程的外接超高精度壓力傳感器，通過超高精度的PID控制器可實現優于±0.1%的精密控制。
二、微負壓超高精度PID控制裝置
Micro Negative Pressure Ultra High Precision PID Control Device
三、電氣比例閥超高精度壓力PID控制裝置
Ultra-High Precision Pressure PID Control Device of Electric Proportional Valve
電氣比例閥超高精度壓力控制裝置主要包括電氣比例閥和相應量程的外接超高精度壓力傳感器，通過超高精度的PID控制器可實現優于±0.1%的精密控制。
四、先導式氣動減壓閥（背壓閥）的精密高壓控制
Precision High Pressure Control of Pilot Pneumatic Pressure Reducing Valve (Back Pressure Valve)
五、應用視頻
Appplication Video
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| 真空控制系統在PVT法碳化硅單晶生長設備中的應用——國產化替代解決方案 | |
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六、應用文章
Appplication Notes
（1）SMC IRV系列手動真空調節閥低壓控制性能考核試驗
SMC IRV Vacuum Regulator Low Pressure Control Performance Assessment Test
（2）工業應用中0.1%超高精度PID控制器的實現及其關鍵指標分析
Realization of 0.1% Ultra-high Precision PID Controller in Industry and Analysis of Its KeyParameters
（3）表壓0.1~0.6MPa范圍內0.1%超高精度壓力控制解決方案及其考核試驗結果
0.1% Ultra-High-Precision Pressure Control Solution in the Range of Gauge Pressure 0.1~0.6MPa and Its Assessment Test Results
（4）微正壓0.1MPa以下的超高精度PID控制及其演示驗證結果
Ultra High Precision PID Control with Micro-Positive Pressure Below 0.1MPa and Its Demonstration and Verification Results
（5）壓力傳感器和電氣比例閥測控精度的基本概念及其使用方法
Basic Concept and Application Method of Measurement and Control Accuracy of Pressure Sensor and Electric Proportional Valve
（6）三種典型電氣比例閥壓力控制精度的對比考核試驗
Contrastive Assessment Test of Pressure Control Accuracy of Three Types of Electrical Proportional Valves
（7）PVT法碳化硅SIC晶體生長工藝高精度壓力控制解決方案及其配套裝置的國產化替代
High Precision Pressure Control Solution for PVT Method SIC Crystal Growth Pocess and Localized Replacement of Its Supporting Equipments
（8）采用電氣比例閥串級控制法實現化學機械拋光（CMP）的超高精密壓力控制
Ultra-High Precision Pressure Control of Chemical Mechanical Polishing is Realized by Cascade Control of Electric Proportional Valve
（9）超長管件注塑過程中采用串級控制實現高壓壓力精密控制的解決方案
Solution of Cascade Control to Realize High-Pressure Precision Control in the Injection Molding Process of Super-Long Pipe Fittings
